Vacuum Instrument and Metrology Division
| Name | Position | Contact | Profession |
|---|---|---|---|
| Cho, Wen-Hao | Research Fellow & Division Director |
03-5779911#641 kesikar niar.org.tw |
Optical Thin Film、Atomic Layer Deposition |
| Hsiao, Chien-Nan | Research Fellow |
03-5779911#180 cnhsiao niar.org.tw |
Thin films materials processes and vacuum technology Ttansmittance electron microscopy |
| Lee, Chao-Te | Research Fellow |
03-5779911#643 tigerlee niar.org.tw |
Design sputtering system and improve the process Nanomaterial Magnetic film |
| Liao, Bo-Huei | Research Fellow |
03-5779911#589 bohuei niar.org.tw |
Design and thin film process development of sputtering system、Design and thin film process development of thermal evaporation、Optical thin film deposition and measurement |
| James Su | Research Fellow |
03-5779911#586 sujames niar.org.tw |
Nano/ micro inspection technologies Pulsed laser applications ISO/IEC 17025 Laboratory Accreditation |
| Tsai, Shu-Ju | Research Fellow |
03-5779911#571 1909975 niar.org.tw |
Scanning Probe Microscopy (SPM)、Heteroepitaxial Growth of III-Nitride Semiconductors、Two Dimensional Materials |
| Zeng, Gui-Sheng | Research Fellow |
03-5779911#647 2309241 niar.org.tw |
Vacuum gauge calibration、Vacuum system、PVD epitaxy process and analysis、Optical thin film process and design、Two-dimensional material process and analysis、Lithography technology |
| Lin, Yu-Chan | Research Fellow |
03-5779911#225 2509356 niar.org.tw |
Extreme Ultraviolet (EUV) Optical Design、Optical and Laser System Design and Integration、Ultrafast Laser and Femtosecond Pulse Technologies、Thin-Film Optics and Optical Coating Technologies、Atomic Layer Deposition (ALD) Technology |
| James Wang | Research Fellow |
03-5779911#329 2509413 niar.org.tw |
Thin Film Stress Measurement 、Development of a Self-contained EUV Metrology Service Platform |
| Chen, Yi-Hsuan | Research Fellow |
03-5779911#625 2009084 niar.org.tw |
|
| Sheng De Weng | Research Fellow |
03-5779911#603 2109142 niar.org.tw |
Thin film Process |
| Le, Tan Dat | Research Fellow |
03-5779911#627 2509402 niar.org.tw |
Optical Thin Film、Python fitting program development |
|
2609434 niar.org.tw |
