Office of Director
Vacuum Technology Group
Vacuum Instrument and Metrology Division
Advanced Process and Equipment Development Division
Intelligent Coating Equipment Technology Division
Optical Technology Group
Precision Optics Manufacturing Technology Division
Intelligent Optical Inspection Technology Division
Sensing & Spectroscopy Imaging Technology Division
Biomedical Chip and System Integration Technology Group
Biomedical Platform and Incubation Services Division
Biomedical Instrumentation Development Division
Organ-on-a-Chip Fabrication and Verification Division
Strategic Planning & Services
Services & Promotion Division