Office of Director
Vacuum Technology Group
Vacuum Instrument and Metrology Division
Advanced Process and Equipment Development Division
Intelligent Coating Equipment Technology Division
Optical Technology Group
Precision Optics Manufacturing Technology Division
Intelligent Optical Inspection Technology Division
Sensing & Spectroscopy Imaging Technology Division
Opto-Mechatronic Systems Integration Devision
Intelligent Automation Systems Division
Strategic Planning & Services
Services & Promotion Division
Office of International Collaboration
Strategy & Planning Team