2013.4
About Instruments Today No. 193
Design and Fabrication of New Generation Laptop Scanning Electron Microscope [ 下載 PDF ]
Wei-Yu Chang, Ying-Shuo Tseng, Jian-Min Fang, Fu-Rong Chen
The commercial scanning electron microscopes are all large in space such that the sample preparation and exchange takes long time. In this article we introduce the basic concept of electron optics in the beginning. In order to achieve the requirement for minimization of scanning electron microscopes, we have done intensive electron optics simulations, and develop the first homemade desktop scanning electron microscope in Taiwan. The size of desktop scanning electron microscope is one third as small as that of a commercial type. The resolution we have achieved is better than 30 nm. By combining the field emission laptop electron microscopes and the aberration correctors, we prospect to achieve the resolution better than 2 nm in the future.
Development of a Piezoelectric Vacuum Sensing Component for Wide-Range Pressure [ 下載 PDF ]
Chia-Che Wu, Che -Yu Lin, Shao-En Chen, Fan-Chun Hsieh, Fong-Zhi Chen
A clamped-clamped beam type piezoelectric vacuum pressure sensing element was developed in this research. The clamped-clamped piezoelectric beam is composed of a PZT layer and a copper substrate. Two pairs of electrodes are set near both ends. Input voltage was applied to one pair of electrodes to vibrate piezoelectric beam and output voltage was measured at the other pair of electrodes. Experimental results showed that developed pressure sensor has a wide range from 6.5 × 10−6 to 760 Torr. Because the viscous forces on piezoelectric beam vary at different air pressure, the vibration of beam depends on vacuum pressure. Experimental results showed that output voltages of piezoelectric sensors were mverse proportional to gas damping ratio. Vacuum pressures were estimated from output voltage.
Introduce of Radial Imaging Capsule Endoscope (RICE) System [ 下載 PDF ]
Wei-De Jeng, Mang Ou-Yang, Hsien-Ming Wu, Ping-Kuo Weng, Ker-Jer Huang
In this study, a radial imaging capsule endoscope (RICE) system is designed, the RICE uses a cone mirror, a radial window shell, and a focus optical module that comprise the radial imaging system. This concept was demonstrated in a packaged optical simulator. The RICE optical model also has been established and verified by many simulations and experiments. In minimizing the sagittal and tangential aberrations, the optical module of the RICE has achieved an F-number of 4.2, a viewing angle of 65.08°, and an RMS radius of the 4th to 6th fields of less than 17 µm. The modulation transfer function (MTF) is remarkably improved from 7% to 36% at 100 lp/mm on the 5th field of the sagittal plane.
Novel Method for Polymer Synthesis: Atom Transfer Radical Polymerization [ 下載 PDF ]
Fu-Sheng Wang, Chi-How Peng
Atom transfer radical polymerization (ATRP), a novel technique in polymer synthesis based on atom transfer radical addition, is famous by the generation of polymers with controlled molecular weight, low dispersity, and defined molecular architectures. In this article we will introduce methods in atom transfer radical polymerization and their properties.
Micro Fabrication on Quartz Glass by Inductively Coupled Plasma-Reactive Ion Etching and Its Application [ 下載 PDF ]
Yu-Hsiang Tang, Mao-Jung Huang, Yu-Hsin Lin, Ming-Hua Shiao
A deep reactive ion etching (DRIE) process of quartz glass with an anisotropic trench structure is presented in this work, using common lithography processes. In this paper, three types of masking systems, positive photoresist (AZ 4620), negative photoresist (KMPR 1050), metal (aluminum) have been studied and the suitability of particular mask type for deep etching of glass with nearly vertical wall profi les. Additionally, the process uses inductively coupled plasma generated by mixed C4F8/He gases. Optimization of etch rate (~ 0.249 µm/min), etched depth (~ 45 µm), side wall angle (~ 89°), and mirror surface (roughness, ~ 4.9 nm) were achieved at the conditions of ICP power (1500 W), RF power (120 W), process pressure (10 mTorr), C4F8 (12 sccm), He (84 sccm). Consequently, our etching method using a KMPR hard-mask and C4F8/He plasma enables the fabrication of very deep trench and vertical profile in quartz glass.
Introduction of Multiple-Camera Digital Image Correlation System [ 下載 PDF ]
Chi-Hung Hwang, Wei-Chung Wang, Yung-Hsiang Chen, Chih-Yen Chen
In this paper, we designed a measuring frame of multi-camera capture apparatus under semi-circular configuration. The position control devices control cameras to the assigned locations along the semi-cicular frame as the specified imaging taken positions; and then the cameras controlled by the rotation control devices fixed on a rotary mechanism would point to the predefined angles, so that the system measuring range can be flexibly modified. All cameras are mounted on a semi-circular frame that makes intersection of all line-of-sights of cameras would locate along a line passing through the center of the semi-circular frame and perpendicular to a plan defined by the semicircular frame. Thank to the geometrical constraint, the system internal- and external- parameters can be rapidly calibrated while the system is reassembled in the filed. Here in this paper, the system calibration for both near- and far- field cases and the geometrical reconstruction of a circular tube is also demonstrated.
The Recent Development of Tip Modification of Field Sensitive Scanning Probe Microscopy—A Prospect from Patent Analysis [ 下載 PDF ]
Chun-Ting Lin, Ming-Han Yu, Po- Li Chen, James Su, Ming-Hua Shiao, Mao-Nan Chang
Field sensitive scanning probe microscopy (FS-SPM) is a crucial approach in the study of micro-nano materials. Also, the modification of the tip apexes in FS-SPM directly determines the capability of field-sensing. In another field of technology, patent analysis and technology mining are powerful tools in early-stage research and development activities. The maturity of any specific technological field can be assessed by the number of patents; the change of impact from patent holders can also be evaluated from patent litigations. In this study, we focus on the recent development of metal tip modification of FS-SPM. The scope of this research covers early publication of patents and issued patents from 1990 to 2012 in the United States. Patent management plots, life cycle analysis, patent maps are utilized to identify important inventors, patentees, and trends. Finally, we proposed several suggestions to the future development of this technology.
