Precision Optoelectronic Instrument Technology

Dynamic Three Dimensional Surface Profi le Measurement Using Composite Structure Light Projection [ 下載 PDF ]

Liang-Chia Chen, Ming-Xuan Weng

In the article, a novel composite fringe profilometry (CFP) method based on both of Fourier Transform Profilometry (FTP) and phase shifting principle (PSP) is newly proposed to achieve the measuring accuracy closely reaching to the approximately same level by PSP, as well as one-shot imaging capability for achieving high-speed 3-D profile measurement. Multi sinusoidal colour fringe patterns are encoded to form a unique composite colour pattern for projecting onto the object's surface, and its reflected deformed fringe image is taken by use of a triple-colour CCD camera and rapidly processed by the developed CFP method employing an innovative band-pass filter. To reconstruct a 3-D profile of an object, a new strategy is developed to wrap three FTP-derived phases by using the PSP method, in which surface reconstruction can be performed robustly for production of high-quality profile information. By measuring standard step heights in a repeatability test, it is confirmed that a maximum measured error can be controlled less than 1.231% of the overall measuring depth range.

Development of a Three Dimensional Scanning Touch Probe [ 下載 PDF ]

Chih-Liang Chu, Hung-Chi Chen, Jhih-Sian Ke

This study develops a three dimensional scanning touch probe. In the mechanism, the Z-axis system achieves its vertical movement by taking advantage of the characteristics of leaf springs. For the design of the XY-axis system, the length, width and thickness of a micro beam and the relevant size of a spring are designed to meet specific contact force. A live center is installed in the center of the structure to inhibit the Z-axis displacement error, so as to achieve the characteristics of three degrees of freedom. In the optical path design, a laser diode, a single-axis PSD (Position Sensor Detector) and a two-axis PSD are adopted as sensing components, then will be able to obtain the size and profile of the workpiece. Based on the validation of experiments, the measuring ranges in the X, Y and Z-axis of the scanning touch probe are ±1 mm × ± 1 mm × 1 mm and an uncertainty of 0.7 µm, while the probe contact force in the X, Y and Z-axis are about 0.26 N/mm, 0.26 N/mm, 0.4 N/mm, respectively.

AMOLED Display Critical Manufacture ProcessInspection Technology [ 下載 PDF ]

Fu-Cheng Yang

Demand should AMOLED (active-matrix organic light-emitting diode) display of the TFT (thin-film-transistor), display manufacturer using the LTPS (low temperature poly-silicon) enhance the TFT channel layer materials electron mobility, ELA (excimer laser annealing) crystallization process for the mainstream. however the quality of the manufacturing process can only use offline or destructive analysis, so they can not do comprehensive inspection for this manufacturing process, there is no good solution for comprehensive inspection problems, in this paper, we introduce the main reason for the introduction of the manufacturing process, and for this inspection problems, we proposed the non-contact and area scan inspection method to solve the inspection problem.

An AOI System for Chip Backside Defects Based on A High Rate Line Scanner [ 下載 PDF ]

Ming-Fu Chen, Po-Hsuan Huang, Chih-Chung Chou, Rui-Cian Weng

According to customer requirements, an optical inspection system for driver IC defects on chip backside is developed to identify defects with size of greater than criteria. An opto-mechanical device is completed to acquire raw images using a high line rate scanner and high resolution lens. A novel defect inspection algorithm is also developed for precisely defects detection. Proposed inspection system is composed of 4 modules including line image acquisition with 5 µm spatial resolution, illumination environment control, defect inspection, and operations and management to inspect defects including residual glue, chipping and crack. LED light source is used for image acquisition because of small size, low power consumption and high illumination. System has some advantages based on a high line rate imager with low geometric distortion and a method of edge pixels statistic for defects detection and size derivation as follows: (1) acquiring chip raw images during packaging process to avoid the pause image acquisition; (2) each chip has a corresponding raw image then image calibration and mosaic can be removed to reduce processing time substantially; (3) inspection accuracy and efficiency can be enhanced based on chip edge image and novel detection method. Therefore, manpower, time and cost for manually defect inspection can be saved. And quality control can be improved comparing with the one by manual way.

Vibration Modulated Subaperture Stitching Interferometry [ 下載 PDF ]

Po-Chih Lin, Hung-Sheng Chang, Yi-Chun Chen, Chao-Wen Liang

A novel subaperture stitching interferometric method is developed to test the surface deformation of the lens by utilizing the mechanical vibrations from a motorized stage. The tested optics is rotated against its symmetrical axis during the interferogram acquisition. The measurement throughput and the subaperture positioning accuracy are improved simultaneously by adopting both the synchronous rotational scanning mechanism and the non-uniform phase shifting algorithm. The experimental measurement shows the stitched phase RMS error of 0.0037 waves proving the feasibility of the proposed method.

---

Micromechanical RF Switches [ 下載 PDF ]

Zung-You Tsai, Ming-Zhi Yang, Ching-Liang Dai

The RF (radio frequency) switch is fabricated by the standard CMOS (complementary metal oxide semiconductor) process. The switch is capacitive type and actuated by the electrostatic force. The structure of the switch consists of a suspended metal membrane and a signal transmission line, springs and spiral inductors. The inductors are used to increase the electrical properties and the operating frequency of the RF switch. The finite element method software, Coventor Ware, is employed to simulate the mechanical properties of the RF switch. The high frequency analysis software, ADS (Advanced Design System), is used to simulate the electrical characteristics of the RF switch. The switch needs a post-process to release the suspended structures. The post-process uses a RIE (reactive ion etching) to remove the silicon substrate under the inductors, and then the sacrificial layer is etched by a wet etching. The experimental results showed that the pull-in voltage of the RF switch was 11 V, and it had an insertion loss of −0.8 dB and an isolation of −25 dB at the working frequency of 35 GHz.

---

Application and Development of LED Lighting in Renewable Energy [ 下載 PDF ]

Rong-Yuan Jou

With the worsening of the dwindling reserves of fossil energy and environmental pollution, looking for clean, renewable energy sources to replace existing fossil fuel, is a crucial task for the human need to be resolved. Only when the waste generated by the renewable energy can be processed before we can really live sustainably. Hydrogen is the best alternative to fossil fuels, and will not cause the load on the environment, can be described as the cleanest fuel because water is the only by-product of hydrogen combustion. In all known biological systems, photosynthetic bacteria are the most efficient producers of hydrogen, and also carbon dioxide can be carbon sources for culture. So based on the best culture conditions of the photosynthetic bacteria, photobioreactor designs using LED light source with features of long life, high conversion efficiency and energy saving, no UV, difficult to damage of solid state components, using these biological characteristics and physical properties to the optimization of the conditions of the probiotic culture, not only to protect the ecological environment, but also to achieve the purpose to improve the global warming phenomenon. In this paper, topics of photosynthetic bacterial hydrogen production, plant factory, and microbial fuel cell which are technologies related to agricultural biotechnology and energy technology are addressed to illustrate how to solve the energy problem or the development of renewable energy in these categories. Moreover, the main scope of the study on the application and importance of the interaction studies in these three technologies LED light source with light machine; can be divided into two major themes: First, the measurement of liquid light intensity; environment for the growth of photosynthetic photon flux density (PPFD) measurements. In addition, because in the progress of technology development and commercialization of equipment, the following difficulties are often encountered: the scale-up of production processing; generated heat removing in process; reactor (tank) optimal design; and environmental monitoring and automation, etc. To assess the technical feasibility, viewpoints of mechanical design engineering are proposed to be the considerations of the LED light source in the energy applications, and actively seek close industry-university cooperation with the industry, to achieve the final goal of establishing domestic equipment technology and development capability.