Analytical Technology for Image Display

"Real-Time Monitoring Methodologies for Ammonia, Amines and NMP in Semiconductor Industry" [ 下載 PDF ]

Paul E. Chang

Basic containing compounds such as ammonia, amines and NMP in cleanroom can cause T-topping, wafer corrosion, haze developed on wafer surface and optical lens even in ppb level. These compounds also classified as molecular bases by SEMI can also affect chemically amplified resist stability. These defects also known as killer defects will not only cause product defects, but also a yield-limiting issue process-wise. Early detecting these pollutants is critical to resolve yieldaffecting problems. Several real-time, continuous monitoring methodologies commonly used in detecting molecular bases will be introduced in this paper.

TOF-SIMS Applications in Flat Panel Display [ 下載 PDF ]

Wen-Yin Chen, Ying-Kuang Hseuh, Chiung-Chi Wang, Yong-Chien Ling

Time-of-flight secondary ion mass spectrometer (TOF-SIMS) is capable of simultaneously analyzing trace elements and organic molecules in mass ranging from hydrogen atom to polymers with molecular weight up to ten thousands amu. TOF-SIMS possesses nanometer depth resolution and imaging capability at < 100 nm lateral resolution. TOF-SIMS could provide chemical composition at the surface and various depth of the sample. It uses pulsed ion source to minimize charging problem and is capable of analyzing insulating sample. Every ion pulse will generate a full-scan mass spectrum, which could further be converted into 2- or 3-dimensional chemical images of elements or molecules. In this paper, we present the application examples of using TOF-SIMS for direct analysis of organic-organic and organic-inorganic interfaces, diffusion of constituents, detailed chemical changes at interfacial layer, and contaminants at device surface, demonstrating that TOF-SIMS is an effective tool for process development and improvement of flat panel display.

Electro-Optical Analysis Technology of Organic Light Emitting Displays [ 下載 PDF ]

Rong-Ho Lee

Rapid advances i.e. low turn-on voltage, satisfactory luminescence intensity with sufficient operation lifetime, full-color displays, and reasonable power efficiency have recently been made in organic light emitting displays, which appear ready to enter commercial stage in the flat-paneldisplay market. Therefore, the electro-optical analysis technology of organic light emitting displays plays a major role in the process. In this paper, the organic light emitting materials, device structure design, principle of light emission, and electroluminescence of organic light emitting displays were introduced first. Subsequently, the evaluation equipment and methodology of the electro-optical properties were reported for the organic light emitting displays. Finally, the voltage-current density, brightness, power efficiency, operation lifetime, spectral distribution, and chromaticity diagram of several small molecular and polymeric materials based light emitting devices were demonstrated.

Application of Conoscope — Fast Viewing-Angle Measurement of TFT-LCDs and the Optical Axis Determination of Liquid-Crystals [ 下載 PDF ]

Po-Lun Chen

Goniometric instrument is a scanning machine with scanning either device under test (DUT) or detector sensor for the measurement. This setup is not practical for large displays and the measurement time is as long as several hours. While at the conoscopic approach, and extended cone of light coming from the measuring spot on DUT is analyzed simultaneously with a special transform lens and a twodimensional detector array. A conoscopic measurement provides a very fast optical performance characterization with the measurement time about 200 ms. Besides, we discuss another important conoscopic application for determining the optical axis orientation of crystals. This judgment helps to verify if the optical axis of liquid crystal follows the operation principle of an intended design.

Recent Development in Organic Light-Emitting Display [ 下載 PDF ]

Cheng-Hung Lin, Tai-Yan Chen, Chien-Hong Cheng

Recently, OLED research and development has attracted great attention due to the application of this technology in the flat panel display. In this paper, the principle of electroluminance, the emitting materials used and the technology for the fabrication of full-color display are described.

Introduction to Transparent Conductive Oxide Thin Films [ 下載 PDF ]

Han-Chang Pan, Ming-Hua Shiao, Chien-Ying Su, Chien-Nan Hsiao

Transparent conductive oxide (TCO) thin films have been extensively used in the optoelectronic application that requires high transmittance in the visible region combined with reasonable conductivity. Moreover, excellent surface smoothness and high etching rate for TCO thin films are also discussed by the researchers. Due to their good properties, higher luminescence optoelectronic device was continuously developed to employ the modified TCO thin films. This paper is to describe a detailed investigation of various deposition method of TCO thin films and the influence of sputtering parameters including impurity doping content, deposition temperature, sputtering power and oxygen partial pressure, on the optical, electrical and structural properties of TCO thin films. To do so, several analytical methods such as X-ray diffractometer, atomic force microscopy, Hall effect measurement, four-point probe measurement and spectrometer were discussed for the characterization of the TCO thin films.

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The Influence of Photoperturbation on Scanning Capacitance Microscopy [ 下載 PDF ]

Mao-Nan Chang, Ji-Jr Luo, Chih Yuan Chen, Chung-Yuan Kung

To meet the requirements of research and industrial applications on the scale down to less than 50 nm, scanning capacitance spectroscopy (SCS) extended from scanning capacitance microscopy (SCM) has been developed to provide complete dC/dV characteristics versus tip biases V. In this work, we demonstrated the influences of photoperturbation within SCM system on SCS characterization. In addition, the photoperturbation-induced characterization errors on electrical junctions are also introduced.

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Principle of SAW Biosensor and Its Application Technology [ 下載 PDF ]

Chii-Rong Yang, Ching-Feng Lee, Jian-Fu Shi

With the rapid development of communication industry, SAW devices are noticeable in communication application because SAW filters have advantages of small volume, lightness, low costs, high IC-compatibility, and better filtering performance. Different piezoelectric materials can be selected to fabricate various filters with dissimilar wave band, and these SAW filters have become key components of wireless communication and mobile phone. Except for satisfactory signal processing application, SAW devices, which have excellent characteristic of high mass sensitivity, have been further applied to bio-sensing areas in the recent decade. In this paper, the development and fundamental principle of biosensing SAW devices are briefly described firstly; the wave propagation, mass sensitivity, application, fabrication process, and measurement techniques of different SAW sensors are further discussed. Finally, a practical case of Love mode SAW senor with ZnO thin film will be also presented.

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The Capabilities and Applications of the Full Wafer AES DRT System [ 下載 PDF ]

Li-Duh Dong

This paper mainly introduces the SMART series tool made in the middle of 1990. This is a semiconductor defect review and surface analysis tool with full wafer AES, EDS and FIB technology on the system. In the paper, we will make a general description of the semiconductor defect inspection and review process, system design principle, capabilities and analysis application.

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Applications of Aspheric Interferometers [ 下載 PDF ]

Mang Ou-Yang, Hsin-Chu Liu

To accompany the substantial progress of the display technology, computer science and information, and optical communication, electro-optical industry is the most potential start of the hi-technology in the future. Optical components play a key role in the electro-optical industries and are designed by using more aspheric lenses for the lighter, thinner, shorter and smaller products. Therefore, metrology in the aspheric lenses becomes a important point. The paper proposes a new polarization shearing interferometer and attempt to solve the problems in the conventional aspheric measurement. The instrument is able to increase the measuring accuracy and quality of production, as well as reduce the measuring time and manufacturing cost significantly.