Microactuator and Microsensor

Applications of Single Crystal SiC in Microelectronic Devices and Microsensors [ 下載 PDF ]

Wei-Hsu Chang, Yu-Chung Huang, Ren-Jie Lin

Because of the wide band gap, microelectronic devices and microsensors based on single crystal silicon carbide own not only abilities to emit and absorb UV light but also performance of working at high voltage so well as in high temperature environment. In this article, the recent SiC process, such as growing of single crystal, thermal oxidation, impurity doping, metal contacting and dry/wet etching, will be discussed. Additionally, diverse SiC electronic devices and microsensors will also be described with respect to different applications.

Fabrication and Application of Micro Flow Cytometers [ 下載 PDF ]

Gwo-Bin Lee, Che-Hsin Lin, Lung-Ming Fu, Ruey-Jen Yang, Bao-Herng Hwei

Flow cytometry is a general method for analyzing micro-particles such as cells, bacteria and even euglena with high efficiency. It has been a popular diagnostic equipment for clinical and environmental applications. Typically, fluorescence-labeled micro-particles are hydrodynamically focused in a flow chamber by neighboring sheath flows and pass through a region where scattered light, fluorescence emission or absorption light is then collected by several sophisticated optical detection equipments. Particles/cells are then sorted using electric or hydrodynamic forces downstream. This paper reports that a micro flow cytometer fabricated using MEMS technology, which combines three critical components including micro hydrodynamic modules, micro optical detection modules and micro flow switches. The development of the micro flow cytometer could be crucial for biomedical applications.

Study on Surface Micromachined Electrothermal Actuators [ 下載 PDF ]

Yen-Jyh Lai, Yu-Shen Lin, Chia-Yu Wu, Chengkuo Lee

In this paper, we introduce several micro-actuators that have been demonstrated by means of surface micromachining technology. The negative effect of floating charge on the motion of the U-shape electrothermal actuator is also described. Since the long-term motion stability of actuator is very crucial for the practical applications, we suggest a suitable pattern that can resolve this problem and enhance the motion stability.

Introduction to Vibrating Micromechanical Resonators for Wireless Communication Applications [ 下載 PDF ]

Yu-Ting Cheng

Utilizing micromechanical circuitry to process RF signal has been an enabling technology for portable wireless communication applications. The advantages include smaller volume, lower cost, and lower power consumption in comparison with the present technologies. The basic element of the micromechanical circuitry is vibrating micromechanical resonator, which have high Q (quality factor) performance more than 10,000 and can be implemented for filter, oscillators and mixer..., etc. to form an integrated RF transceiver. In this paper, we will introduce the fundamental principles, microfabrications and related technical prospects of the vibrating micromechanical resonators.

Introduction of Optical MEMS Actuators [ 下載 PDF ]

Shih-Yun Hung, Chun-Kai Liu, Chengkuo Lee, Ruey-Shing Huang, Min-Shyong Lin

Microactuators are critical elements in all microsystems which require components that are not stationary. Numerous technologies have been developed in the field of MEMS to provide actuation. These devices are both surface and bulk micromachined and employ a variety of actuations including electrostatics, thermal expansion, piezoelectric and magnetism to generate forces and displacements. With the rapid growth of micro-opto-electrical-mechanical system applications new actuators are required with unique characteristics. In this paper a review of common actuation technologies is presented. In addition to actuation methods, the ways of these actuators being applied to Microsystems will be illustrated.

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Development of Optical Communication Components by ICP-RIE Silicon Deep Dry Etching Process [ 下載 PDF ]

Yi -Chiuen Hu, Yu-Hsin Lin, Hung-Ling Yin, Hui-Ysiung Lin, Hsiao Yu Chou

The development of high aspect ratio ICP-RIE Si dry etching process has been recently making great progress in the fabrication of microstructure with aspect ratio up to 30 and sidewall approach to 90 ±1 degree. Such development has enabled a lot of application such as optical communication components. In this paper, we will describe the development of optical switch and DWDM by high aspect ratio Si dry etching process.

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Coincidence Techniques as Applied to Chemical Physics (III) [ 下載 PDF ]

Kaidee Lee

Various coincidence techniques pertaining to electron impact excitation and photoabsorption in the realm of chemical physics are presented, in an attempt to elucidate the roles they play in unraveling the intricate decay paths of excited states. This article intends to convey, via the diversity of the coincidence techniques mentioned, the broader stage and wider vistas created for them by synchrotron soft X-ray and X-ray chemical physics research in the last ten years. The latter part of the article discusses the two-dimensional position detection schemes introduced into the coincidence techniques gradually in recent years, and the envisioned trailblazing role played by real-time ion imaging and the associated momentum coincidence, resulting from integration of the former two, in the study of molecular fragmentation dynamics.

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Technology of Laser Wavelength Conversion with Birefringent Crystals [ 下載 PDF ]

Y. C. Chen, S. W. Tsai, Y. P. Lan, Yung-Fu Chen

It is necessary to have laser light source especially visible wavelength lasers in industrial and medical applications. The nonlinear optics frequency conversion is the foundation to achieve the different wavelength lasers. However, the derivations and mathematical calculations of nonlinear theory were omitted in general textbooks. Therefore the detail description and derivations are the main purpose of this article for those people interested in this field.

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The Technology of Low Temperature Polysilicon Thin Film Transistor [ 下載 PDF ]

Chih-Chiang Chen

Low temperature polycrystalline silicon (LTPS) technology has been the most promising method to manufacture next generation display. Compared to the conventional amorphous silicon TFTs, the LTPS has higher mobility and smaller design rule. To realize system on panel, the polysilicon crystallization, gate insulator, ions doping and activation were widely adopted in active matrix array and integrated peripherals circuit. Using those technologies we can achieve better device characteristic and more system integrated. In this article we will introduce the technology of low temperature polysilicon TFTs.