2003.10
About Instruments Today No. 136
Flat Panel Display
Low-Temperature Polysilicon Thin Film Transistor Technology and Its Applications on Flat Panel Display [ 下載 PDF ]
Huang-Chung Cheng, Ting-Kuo Chang, Chun-Chien Tsai, Bo-Ting Chen, Jian-Hao Lu
Low temperature poly-Si thin film transistors (LTPS TFTs) technology possess the capability of low temperature CMOS process on large-substrate with small device size feature, and it has shown the potential of replacing the traditional a-Si TFTs technology in the future for the driving device of AMOLED. Moreover, by promoting device performance further, peripheral driving circuits, control circuit, memory devices, and even CPU can all be fabricated on the same substrate. This can approach the goal of 'system on panel'. However, there are still lots of problems on LTPS TFTs fabrication process which need to be solved, such as the crystallinity and uniformity improvement of poly-Si thin films, the formation of the high-quality low-temperature deposited gate oxide and so on. It is impossible to produce high-performance TFTs without solving those problems above. In this article, the nowadays technology of the LTPS TFTs will be investigated and its applications on the flat panel displays will be also be introduced.
High Quality Poly-Silicon Thin Film Transistor — The Mechanism of Nickel Induced Lateral Crystallization of Amorphous Silicon [ 下載 PDF ]
Hsiu-Fang Hou, Chi-Pin Lu, Tza-Hao Wang, Li-Jen Chou
Thin film transistor liquid crystal display has shown the great potential to be the leading candidate in the flat panel display family. Several related issues including picture quality enhancement and power consumption reduction are the hot topics under extensive considerations. In this article, nickel metal induced lateral crystallization (Ni-MILC) of amorphous silicon was studied by means of high resolution transmission electron microscopy (HRTEM) and Raman spectroscopy. It was found that the nickel pattern as well as the thickness of the amorphous Si (a-Si) substantially influenced the orientation and grain morphology of the induced crystallites.
Investigation of Defect Inspection Technology on TFT-LCD Manufacturing [ 下載 PDF ]
Jiun-Jye Chang, Chun-Yao Huang, Huang-Chung Cheng
The most important components of AMLCD (active matrix liquid crystal display) are TFT (thin film transistor) devices. The manufacturing stability and devices reliability are more and more important when the panels and glass become larger during TFT-LCD fabrication. We indicated the technology of auto defect inspection system for improving the manufacturing yield. After investigating the hardware equipment and inspection methodology of inspection system, we tried to classify the process defects not only on TFT array but also CF processes.
Progress of Wide View-Angle Technology in TFT-LCD's [ 下載 PDF ]
Miin-Horng Juang
As compared to conventional liquid-crystal-display apparatus, the usage of multi-domain-verticalalignment (MVA) mode and in-plane switching (IPS) mode would need different design rule and structure. However, taking into account the products with larger size than 17 inches or high performance, such as the applications in TV, both the MVA and IPS technologies become increasingly important in the market. In terms of MVA technology, it can achieve wide-view-angle (WVA) characteristics, high contrast, high brightness, short switching time, and low cost. Hence, MVA has become one of the main technologies in large-size TFT-LCD's. In addition, with the progress of new techniques, the motion picture quality, the brightness, and the view-angle characteristics have been largely improved. Thus, MVA TFT LCD's become available for the application to LCD-TV. On the other hand, IPS mode is also one of the main technology in largesize TFT LCD's, new fabrication technology have been continuously innovated to improve the response time and other display characteristics. In the article, we would explain the progress of the wide view angle technology in TFT LCD's.
Applications of Materials Analyses in Panel Display Industries [ 下載 PDF ]
Yong-Fen Hsieh, Chin-Kun Lo
Comparing with the feature size of IC devices, panel display possesses relatively large dimension. The analysis techniques seldom require the excellent performance and reach the limitation of detection. Since the number of miscellaneous components and raw materials are more than 100 items, the field of applications of materials analyses is more versatile in display manufacturing. This article is mainly to share authors' experiences in the analytical works of TFT-LCD, LTPS, OLED, and LCOS. It is deeply believed that materials analysis is the key to enhance the product quality and to be definitely mandatory in R&D activities.
Fabrication of Nickel Oxide Nanostructures and Its Application to Selective Growth of Carbon Nanotubes [ 下載 PDF ]
Hsin-Wen Lai, Ju-Hung Hsu, Heh-Nan Lin, Chia-Chih Chuang, Jin-Hua Huang
The atomic force microscopy nano-oxidation has attracted tremendous research interests in recent years due to its advantages of nanoscale resolution, wide range of applicable samples, and operation under ambient conditions. In this paper, we report the fabrication of nickel oxide nanostructures by nano-oxidation and subsequent wet etching. The oxide patterns are then used as catalytic templates and the selective growth of carbon nanotubes is realized.
Low-Photo-Perturbed Scanning Capacitance Microscopy and Its Applications on Analyzing Carrier Distribution [ 下載 PDF ]
Mao-Nan Chang, Chih Yuan Chen, Wen-Wu Wan, Jenq-Horng Liang, Fu-Ming Pan
Scanning capacitance microscopy (SCM) is capable of measuring two-dimensional carrier distribution and the corresponding surface morphology carried out from contact-mode atomic force microscope (AFM). The stray light of the AFM laser beam induces the photoperturbation effect, leads to distorted dC/dV profiles and hence perturbs the contrast of dC/dV images. Using crosssectional samples implanted by BF2+ ions, we revealed the existence of photoperturbation effect in SCM and analyzed the influence of photoperturbation effect on dC/dV signals in depth. Moreover, in this article, we will introduce low-photo-perturbed SCM and its applications on analyzing the change in carrier concentration distribution induced by annealing sequence.
The Application of Molecular Beam Epitaxy and Atomic Force Microscopy in II-VI Compound Semiconductor Nano-Structures [ 下載 PDF ]
Wu-Ching Chou, Chu-Shou Yang, Ming-Chin Kuo, Yi-Jen Lai
In this works, the molecular beam epitaxy and the atomic force microscopy were introduced. The nano-structures based on the II-VI compound semiconductor were grown by molecular beam epitaxy. The surface morphologies and optical properties were studied using atomic force microscopy and photoluminescence. Finally, we also illustrated the growth process of the nano-light emitting diodes.
Applications of Microwave Extraction [ 下載 PDF ]
Chung-Yu Chen, Maw-Rong Lee
Sample preparation is very important in instrumental analysis. Many of the problems related to sample preparation are specific to individual sample matrices, analytes, and instrument methods. Recent advances of sample preparation techniques based on microwave technology, indicate that it is essential for trace analysis in complex matrices. The advantages of microwave extraction include faster reaction rates that result from the high temperatures and pressures attained inside the sealed containers. This paper is intended for all researchers who desire a through understanding of the theory and application of this technology.
Miniaturized Fluorescence Detection System [ 下載 PDF ]
Jerwei Hsieh, Chun-Jen Weng, Ming-Yu Lin
Miniaturization of fluorescence detection system can posses more advantages than the traditional instruments such as portability and reduced cost, and has attracted many relative researches recently. In the article, fluorescence immunoassay (FIA) is described first to explain how the useful information can be extracted through the fluorescence detection. The module design considerations for fluorescence detection system are then discussed. Based on the knowledge, this article divided the system integration methods from literatures into two categories. Several examples under such classification are explained and compared, in order to lead reader into better understanding on the miniaturized fluorescence detection system.
An Introduction to Integrated Surface Analysis System [ 下載 PDF ]
Jing-Chie Lin, Wern-Dar Jehng
A novel surface analysis system integrated by AES/ESCA/UPS was introduced in this work. The principles, characteristics, applicable fields and limitations of this new system were discussed concisely. A few examples were given to demonstrate the advantages of the integrated system.
