2004.12
About Instruments Today No. 143
Nanometric Characterization and Applications
Applications of Conductive Atomic Force Microscopy on IC Fabrication and Leaky Contact Analysis [ 下載 PDF ]
Jung-Hsiang Chuang, Jon C. Lee, Chao-Chi Wu, Tsung-Te Li, Tung-Teng Yao
Conductive atomic force microscopy (C-AFM) is a popular technique for the electrical characterization of dielectric film and gate oxide integrity. In this article, C-AFM has been successfully applied to fault identification in contact level and the discrimination of various contact types. Faulty contacts can be easily isolated by current mapping of C-AFM, in addition, it also can provide I/V curve for failure root cause judgment.
Introduction of the Nanometer Scale Instruments and Standards [ 下載 PDF ]
Chao-Jung Chen, Yen-Liang Chen, Chen-Yu Wang, Shan-Peng Pan, Hye-Young Ahn
Nanotechnology might be the main industrial technology in 21 century after steam engine, transistor, and semiconductor. Nanotechnology means the innovative research of material properties of size between 1 nm and 100 nm. Beginning from the former American president Clinton signed the National Program for Nanotechnology, all the world started to put more supports on advanced research in nanoscience and nanotechnology. Taiwan government established the 'National Science and Technology Program for Nanoscience and Nanotechnology' in 2002. The research budget is about 21.2 billions from 2003 to 2008. This paper describes the nanotechnology related nanometrological instruments and their standard traceability. The measuring parameters are 3D topography, step height, film thickness, and nanoparticle size.
Introduction and Applications of Single Quantum Dot Spectroscopy [ 下載 PDF ]
Wen-Hao Chang, Tzu-Min Hsu
Single quantum dot (QD) spectroscopy has been a powerful tool for the investigation of fine structures being hidden behind the inhomogeneous broadening of a QD ensemble. More and more new phenomena in mesoscopic QD systems are revealed by this technique. With the progress in the manipulation of single quantum system (such as single electrons, single excitons and single photons), the application areas of semiconductor QDs have been gradually pushed from the conventional optoelectronic devices into the single-QD-based quantum device.
Image Process and Analysis of Scanning Capacitance Microscopy [ 下載 PDF ]
Chih Yuan Chen, Mao-Nan Chang
With the coming of nano-generation, surface analysis for a nanometric area is more and more important. Scanning probe microscopy (SPM) is one of the important tools for nanocharacterization, providing physical information with nanometric resolution on sample surface. SPM tip is a key influencing the acquirement of real and accurate SPM images. In this article, we described the influence of SPM tip on SPM images. Moreover, we also introduced the special functions of scanning probe image processor, including Fourier analysis and tip characterization.
The Electronic Speckle Pattern Interferometry Method with Phase Moduled by Environmental Noise [ 下載 PDF ]
Chi-Hung Hwang, Wei-Chung Wang, Tzong-Wei Hsu
It is not easy to prevent environmental noise while measuring object vibration by electronic speckle pattern interferometry. To meet the industrial requirement on vibration measurement, in this paper, environmental noise is re-investigated to establish a new ESPI method. In this paper, the environmental noise is treated as phase modulation driving force and applied both on the measuring object and optical system. Two images with the same nominal driving force but grabbed at different time are subtracted and then clearer, more stable and double denser fringe pattern than traditional ESPI pattern is obtained. Finally, the ways to analyze fringe pattern and associated errors have also been discussed.
Luminometer [ 下載 PDF ]
Jiann-Hua Wang, Tsung-Kai Chuang
Luminescence has been used to probe chemicals or biological samples for several decades. Because of the development of instruments and measurement technology, luminometer is more sensitive and can measure various samples. This article would like to introduce the mechanism of luminescence, the principle of the instrument, commercial luminometers, and the applications. It can let readers to understand a luminometer more.
Techniques and Development of Electrophoresis-Based Microfluidic Chip [ 下載 PDF ]
Hsuan Hsiu Hsu, Hong-Ling Yen
Microfluidic chip is a novel technology in the biochip field. Research in microfluidic chip is remarkable in that is spans an incredible wide spectrum of topics in MEMS, chemistry, physics, biology and optics. This article will focus on the electrophoresis -based microfluidic chip, and introduce the system from the principle, designs, fabrication and relative information. The system of microfluidic chip includes chip fabrication, sample separation, optics, the control of high voltage and data acquisition. The high sensitivity and high efficiency brings this electrophoresis-based microfluidic chip in a widely used analytical tool.
Highly Sensitive Interferometer Biosensor Based on the SU-8 Optical Waveguide [ 下載 PDF ]
Cheng-Hsien Kuo, Yen-Chang Huang, Yuan-Hau Tsai, Bor-Yuan Shew, Chang-Pin Chou
SU-8 resist was used as a core/cladding waveguide material to fabricate a Mach-Zehnder interferometer (MZI) for biochemical sensing. In order to provide a single-mode transmission, the refractive index of the SU-8 resist was modified to transmit the light in the waveguide. The UV lithography processes of the SU-8 resist were also optimized to pattern the high-resolution (≤ 1 µm) and high aspect ratio (AR = 6) Y-branch structure of the optical interferometer. In the future, the polymer MZI chip can be mass-produced by molding (or the LIGA process). The low-cost, labelfree, real-time and high-sensitivity MZI chip will benefit many applications related to biological, environmental and industrial detection.
Precision Angular Measurement Instrument—Table Control Ultradex [ 下載 PDF ]
Chieh Ho
Table control Ultradex (precision index) is one of the most important instruments in angular measurement. When drilling a hole with an angle respect to the machining surface, the accuracy of the angle becomes very important. The table mentioned in this paper can be operated through a computer controlled system. This paper presents a convenient way of calibration Table control Ultradex. The classical way of calibrating this instrument using a standard polygon will introduce the uncertainty of itself and the instrument under test. To demonstrate the traceability uncertainty can be narrowed to 1/4 arc second, the theory of a new calibration method is introduced in this paper. Hopefully readers will have some ideas after reading it.
Development of Gas Sensor in Application by Nanomaterial [ 下載 PDF ]
Ren-Jang Wu
In recent years, the rapid development of technology on nanomaterial fabrication has been developed. This is due to the fact that its small volume, lightweight, and low cost gas sensors are used in many fields. In a marketing research point of view, mass production and development of gas sensor will be promoted in the future. Researchers have tried to apply nanomaterials in gas sensor and found that it posses some benefit which include high sensitivity operation in room temperature and miniature structures. This composition contains the theory of gas sensor, its current development and application, and nanomaterials of gas sensor in Taiwan and other countries.
