2002.10
About Instruments Today No. 130
Semiconductor Optoelectronics
Fabrication Technology for Semiconductor Optoelectronic Active and Passive Devices [ 下載 PDF ]
Yen-Juei Lin, San-Liang Lee
The rapid progress of information and communication industries is driving vast applications of optoelectronic components and systems. Integration, hybrid or monolithic, is the key to build compact and reliable components and modules. It can also reduce the cost to increase the applications of optoelectronic technology. We will introduce some of the key processing technologies for fabricating the active and passive components, including thin-film deposition, photo-lithography, dry and wet etching, and grating fabrication. We describe the fabrication procedures of DFB lasers and planar waveguide circuits as application examples of the above technologies.
Introduction to Metal-Organic Vapor Phase Epitaxy System and Technology [ 下載 PDF ]
Wei Lin
This paper introduces the metal-organic vapor phase epitaxy (MOVPE) technology and the system via a simple way. Dr. H. M. Manasevit invented this technology about 33 years ago. Nowadays, this epitaxy technology is widely applied in growing compound semiconductor material and in mass production of related opto-electronic epiwafers. Taiwan had developed a lot in opto-electronics like the LED, LD, and HBT applications in passed decade. There are more than 30 companies doing business in this domain and some of them owned totally more than 180 MOVPE machines. This paper will introduce the features of MOVPE machine, especially the design of growth chamber. Since the author has being in the epitaxy work using Thomas Swan's machine for years, he will give more details on it.
Molecular Beam Epitaxial System for III-V Compound Semiconductor [ 下載 PDF ]
Hao-Hsiung Lin, Po-Wei Liu, Fu-Yu Chang
Molecular beam epitaxy has been one of the important epitaxial techniques for III-V compound semiconductor both in scientific research and industrial production. We introduce the details of the molecular beam epitaxial system including vacuum chambers, Knudsen cells, manipulator, and in situ measurement tools. Two applications, Sb-based quantum well and InGaAs quantum dot grown by molecular beam epitaxy, are also reported.
Packaging of Laser Diode Module for Telecommunication Applications [ 下載 PDF ]
Wood-Hi Cheng, Maw-Tyan Sheen
One of the key components used in fiber-optic communication system is the transceiver module. The transceiver module can be used the exchange between optical and electrical signals. This report will cover the type, application, and method for packaging of laser diode module for fiber-optic communications.
Quasi-Phase-Match Double Frequency of Green Laser Based on Lithium Niobate [ 下載 PDF ]
Yung-Chang Zhang, Yi-Chun Shih, Chao-Ching Hsu, Lung-Han Peng
The use of a quasi-phase-matching (QPM) technique in nonlinear wave interactions has attracted much attention to generate short wavelength and infrared lasers. Due to the domain merge by the high coercive field (Ec ∼ 21 kV/mm), the fabrication of short period (< 10 µm) periodically poling lithium niobate (PPLN) become a difficult task. We solve the problem by using a two-step procedure consisting of a high-temperature treatment followed by pulsed field poling. 1-D PPLN with 6.7 µm period and 2-D PPLN with 6.8 and 13.2 µm were successfully produced. Using these PPLN, we can generate QPM laser which wavelength is 532 nm.
Design Principles and Applications of the Infrared Imaging Camera [ 下載 PDF ]
Chieh-Hsiung Kuan
This paper reports the fundamental concept of the blackbody radiation and the basic structure of the infrared imaging camera. In particular, the superlattice structure, the single and double superlattice infrared photodetectors are discissed in details. The design principles of the associated detector array are also described. The superlattice structure is responsible for the absorption of the infrared radiation. In the detector, in addition to superlattice, there is a wide barrier acting as an energy filter to select the photoelectrons. The appropriate combination of the superlattices and the wide barrier creates a multicolor infrared photodetector. In particular, we also describe how to apply the detector array on the construction of the infrared imaging camera which is able to detect the infrared and visible radiation simultaneously and how to utilize the detector to remotely sense the object's temperature.
The Applications of Charge-Coupled-Device (CCD) on Biological Fluorescence Microscope [ 下載 PDF ]
De-Ming Yang, Chin-Wen Chi
The fast and dramatic development of charge-coupled device (CCD) has made our images of life digital and colorful. In this article, the authors describe the basic principle and application of research grade, low-light-level, high sensitive, fast cooled CCD to be integrated into the biological fluorescence microscope. This integration system was used to fit the needs of basic research in single cell level images. Several examples, such as cytosolic calcium image measurement and movement tracking of cytosolic particles or specific organelle will also be introduced in this article. The high compatibility with other types of microscope, such as total internal reflection fluorescence microscope and polarization microscope has made this system one of the best tools in single cell research.
New Helper of Nondestructive Measurement-- Scanning Acoustic Microscope [ 下載 PDF ]
Ray-Hua Horng, Shao-Hua Huang
This paper introduces the basic principal, system and applications of scanning acoustic microscope. Especially, the inspection of semiconductor applications will be described in detail.
System-Level Test of VCDi Air-Borne Remote- Sense Imaging Sensor [ 下載 PDF ]
Ho-Lin Tsay, Fang-Hsuan Su
VCDi is an air-borne multi-spectral remote-sensing imager. Design, development, and test of this system are performed in Precision Instrument Development Center, National Science Council. Airborne functional test for this system was carried out on one of the four multi-spectral bands in April 2002. Test flow and test setup are built for this system in PIDC. Two of the main items in systemlevel tests, radiometric calibration and geometric parameters measurement, were introduced in this article.
The Volumetric Calibration Methods of Automatic Flow Rate Calibrators [ 下載 PDF ]
Chieh Ho
The Brooks Automatic Gas Calibrator in Instrument Calibration Section is out of work after longterm use. The start-stop photocells were changed and the mercury in the mercury sealed pistons was also refilled again. This paper discussed the volumetric calibration methods of automatic flow rate calibrators and some uncertainty analysis. The operation procedure and mechanical structure of the gas calibrators were also introduced briefly. Any comments on this paper will be highly appreciated after reading it.
Counting Technique of Gamma Nuclides by Using a New Type Portable Germanium Detector System [ 下載 PDF ]
Ching-Tsung Yu, Tsung-Yuan Wang, Tser-Min Chang
The portable high purity germanium detector is widely used in situ gamma nuclides characterization for radwaste from industry, hospitals, and research institutes. Its advantage is high efficiency, high resolution and convenient to carry with. Using of Canberra new type digital signal processor, Inspector 2000, combined with proper counting conditions and software, we can get the qualitative and semi-quantitative data of gamma nuclides in the samples very easily. Those information are needed by the radwaste management organization for administration process. By combining Microshield simulation program and D to C (dose to curie) calculation method, it will extend the application area as a portable gamma detection system to analyze the 55-gallon radwaste drum .
